Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 13 citations · 24 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsPhotovoltaic MaterialsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSemiconductor Thin FilmsSolar CellsAlloy SemiconductorsBarrier LayersCross-sectional MorphologyNitride Thin FilmsNitrides Thin FilmsQuantum Well Solar CellsSemiconductor NanostructuresStrain Relaxation
Dilute-nitride GaAsNx epilayers were grown on GaAs (001) substrates at temperatures of ∼450 °C using a radio-frequency plasma-assisted molecular/chemical beam exitaxy system. The concentration of nitrogen incorporated into the films was varied in the range between 0.01 and 0.04. High-resolution electron microscopy was used to determine the cross-sectional morphology of the epilayers, and Z-contrast imaging showed that the incorporated nitrogen was primarily interstitial. {110}-oriented microcracks, which resulted in strain relaxation, were observed in the sample with the highest N concentration ([N] ∼ 3.7%). Additionally, Z-contrast imaging indicated the formation of a thin, high-N quantum-well-like layer associated with initial ignition of the N-plasma. Significant N contamination of the GaAs barrier layers was observed in all samples, and could severely affect the carrier extraction and transport properties in future targeted devices. Dilute-nitride quantum-well-based photovoltaic solar cells were fabricated having a band-gap energy of 1.19 eV, which was attributed to the dilute-nitride layer.
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