Applied Physics Letters · 1998 · 174 citations · 15 references
Optical MaterialsPost-growth TreatmentsEngineeringNx LayersCrystal Growth TechnologyLaser ApplicationsOptoelectronic DevicesOptical PropertiesGrown GaasPhase SeparationMolecular Beam EpitaxyEpitaxial GrowthCompound SemiconductorMaterials ScienceElectrical EngineeringOptoelectronic MaterialsSemiconductor MaterialDimethylhydrazine PrecursorApplied PhysicsOptoelectronics
A detailed study on the optical quality of atmospheric pressure metalorganic vapor phase epitaxy grown GaAs(1−x)Nx epilayers (on GaAs substrates) in which the N incorporation is accomplished using dimethylhydrazine precursor is reported. We show here that the poor optical quality of these as-grown layers can be significantly improved by carefully planned post-growth heat treatments. Optical data are presented to demonstrate unambiguously that such treatments affect in no way the physical properties of these metastable layers (no phase separation) and that the improvement of their optical quality is closely connected to the incorporation behavior of N in this growth method.
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