Publication | Closed Access
Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator
29
Citations
16
References
2016
Year
Electrical EngineeringEngineeringMicrofabricationResonance FrequencyMechanical EngineeringQuality FactorCmos-mems Paddle ResonatorMicro-electromechanical System
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