Journal of Materials Science Materials in Electronics · 2016 · 23 citations · 34 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor DevicesSemiconductor MaterialsThin FilmsDielectric MaterialsDielectricsSemiconductor Device MaterialsSemiconductor Thin FilmsThin-film MaterialsThin-film TransistorsGate DielectricsHigh-dielectric-constant MaterialsHigh-k DielectricsOxide DielectricsOxide Thin-film TransistorsThin-film DielectricsThreshold VoltageThreshold Voltage Extraction
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High dielectric constant oxides
John Robertson · The European Physical Journal Applied Physics · 2004 · 1.8K citations · Full text