Concepedia

Measurement of the Surface Force in Micro Structures and Its Reduction

Shigeki Tsuchitani, Seiko Suzuki, Satoshi Shimada, Masayuki Miki, Masahiro Matsumoto, Satoru Kuragaki

Transactions of the Society of Instrument and Control Engineers · 1994 · 10 citations · 2 references

Open access

Concepts

EngineeringMaterials SciencePhysicsMicroelectromechanical SystemsMicrofabricationSurface ScienceContact MechanicsForce SensorsNanomechanicsSurface CharacterizationSurface MetrologySurface TensionMicrocontact MechanicsMicromechanical TestingMicroscale Force MeasurementSurface Force MeasurementsSurface Mechanics

References

2

Frictional study of IC-processed micromotors

Yu‐Chong Tai, R.S. Muller · Sensors and Actuators A Physical · 1990 · 126 citations

Engineering, Materials Science, Mechanical Engineering +11

Operation of harmonic side-drive micromotors studied through gear ratio measurements

Mehran Mehregany, S.M. Phillips, E.T. Hsu et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 30 citations

Engineering, Mechanical Engineering, Actuators +14