Covalent Nitrides for Maskless Laser Writing of Microscopic Metal Lines

Chemical perspectives of microelectronic materials

M. Gross, Joseph M. Jasinski, John T. Yates · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1989 · 120 citations

Natural Sciences, Chemistry, Materials Science +17

Photodeposition of aluminum oxide and aluminum thin films

Raj Solanki, W. H. Ritchie, G. J. Collins · Applied Physics Letters · 1983 · 106 citations

Natural Sciences, Materials Engineering, Materials Science +13

Science and technology of microfabrication

R. E. Howard, Evelyn L. Hu, S. Namba et al. · 1987 · 30 citations

Engineering, Materials Engineering, Materials Science +17

Maskless laser writing of silicon dioxide

Robert R. Krchnavek, H. H. Gilgen, Richard M. Osgood · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1984 · 18 citations

Engineering, Materials Engineering, Materials Science +17

Direct Writing Laser Doping from Spun‐On Glasses

J. L. Castaño, Javier Garrido, J. Martı́nez et al. · Journal of The Electrochemical Society · 1991 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +10