Science and technology of microfabrication

Abstract

This book contains over 50 selections. Some of the titles are: Fabrication of encapsulated indium films for melting experiments; Material considerations in the microfabrication of grating microstructure for use in a laser-powered linear accelerator; The characterization of silicon damaged by low energy argon ion etching; and Nitride, nitrided oxide and oxidized nitride for thin dielectrics.