Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 17 citations · 2 references
EngineeringQuality ManagementProcess Systems EngineeringProcess ValidationQuality EngineeringDigital Signal ProcessingSurface MetrologySurface RoughnessLine Edge Roughness AnalysisLine RoughnessLine WidthLine Width Roughness AnalysisLine-edge RoughnessPower Spectral DensityPower Spectral Density AnalysisProcess Monitoring
The line edge roughness (LER) and line width roughness (LWR) transfer in a self-aligned quadruple patterning (SAQP) process is shown for the first time. Three LER characterization methods, including conventional standard deviation method, power spectral density (PSD) method and frequency domain 3-sigma method, are used in the analysis. The wiggling is also quantitatively characterized for each SAQP step with a wiggling factor. This work will benefit both process optimization and process monitoring.
2