An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry

Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry

Abraham P. Lee, C. McConaghy, Gary E. Sommargren et al. · Journal of Microelectromechanical Systems · 2003 · 83 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Analysis of measurement accuracy in sinusoidal phase modulating interferometry

Osami Sasaki, Hirokazu Okazaki · Applied Optics · 1986 · 67 citations

Engineering, Electrical Engineering, Instrumentation +14

A z-axis differential capacitive SOI accelerometer with vertical comb electrodes

Toshiyuki Tsuchiya, Hirofumi Funabashi · Sensors and Actuators A Physical · 2004 · 60 citations

Engineering, Electrical Engineering, Mechanical Engineering +11

Diffraction effects of telescope secondary mirror spiders on various image-quality criteria

James E. Harvey, Christ Ftaclas · Applied Optics · 1995 · 44 citations · Full text

Natural Sciences, Astronomy, Physics +17

Micromachined array-type Mirau interferometer for parallel inspection of MEMS

Jorge Albero, Sylwester Bargiel, Nicolas Passilly et al. · Journal of Micromechanics and Microengineering · 2011 · 39 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16