Wafer level vacuum encapsulated tri-axial accelerometer with low cross-axis sensitivity in a commercial MEMS Process

Micromachined inertial sensors

N. Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE · 1998 · 1.8K citations

Inertial Sensors, Engineering, Micromachines +12

A monolithic three-axis micro-g micromachined silicon capacitive accelerometer

Junseok Chae, Haluk Külah, K. Najafi · Journal of Microelectromechanical Systems · 2005 · 186 citations · Full text

Electrical Engineering, Engineering, Micromachines +13

A study on wafer level vacuum packaging for MEMS devices

Byeungleul Lee, Seonho Seok, Kukjin Chun · Journal of Micromechanics and Microengineering · 2003 · 138 citations

Mems Devices, Engineering, Vacuum Packaging Process +18

A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier

Hongwei Qu, Deyou Fang, Huikai Xie · IEEE Sensors Journal · 2008 · 127 citations

Single Proof Mass, Sensing Electrodes, Electrical Engineering +11

Micro-gravity capacitive silicon-on-insulator accelerometers

B.V. Amini, Farrokh Ayazi · Journal of Micromechanics and Microengineering · 2005 · 92 citations

Low-power Electronics, Electrical Engineering, Biomedical Sensors +13