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Optical emission spectroscopy investigation on SiCOH films deposition using decamethylcyclopentasiloxane electron cyclotron resonance plasma

Materials ScienceSicoh Films DepositionEngineeringPhysicsOptical DiagnosticsSpectroscopyOptical PropertiesApplied PhysicsNatural SciencesChemical Vapor DepositionPulsed Laser DepositionOptoelectronicsPlasma ProcessingThin Film Processing