Hot-embossing performance of silicon micromold coated with self-assembled n-octadecyltrichlorosilane

Estimation of the surface free energy of polymers

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Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

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Masako Tanaka · Microelectronic Engineering · 2007 · 164 citations

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Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS

W. Robert Ashurst, Christina Yau, Carlo Carraro et al. · Sensors and Actuators A Physical · 2001 · 160 citations

Natural Sciences, Materials Engineering, Materials Science +15