Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications

Proceedings of 1995 IEEE International Conference on Robotics and Automation

1995 · 2.8K citations

Engineering, Mechanical Engineering, Robotics Engineering +12

Piezoresistance Effect in Germanium and Silicon

Charles S. Smith · Physical Review · 1954 · 2K citations

Natural Sciences, Materials Science, Physics +10

A graphical representation of the piezoresistance coefficients in silicon

Yozo Kanda · IEEE Transactions on Electron Devices · 1982 · 897 citations

Natural Sciences, Materials Engineering, Materials Science +10

Microelectromechanical systems (MEMS): fabrication, design and applications

Jack W. Judy · Smart Materials and Structures · 2001 · 817 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Responses in glabrous skin mechanoreceptors during precision grip in humans

G. Westling, Roland S. Johansson · Experimental Brain Research · 1987 · 498 citations

Engineering, Biophysics, Biomechanics +13