Mechanisms of ion-induced GaN thin layer splitting

O. Moutanabbir, Yves J. Chabal, M. Chicoine, Silke Christiansen, R. Krause‐Rehberg, F. Schiettekatte, Roland W. Scholz, Oliver Seitz, Stephan Senz, F. Süßkraut,

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2009 · 18 citations · 18 references

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