Journal of Crystal Growth · 2010 · 14 citations · 26 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsOptoelectronicsSemiconductor MaterialsDefects In Electronic MaterialsEtching ProcessesSemiconductor DefectsWide Band Gap SemiconductorsWide-bandgap Semiconductor DevicesWide-bandgap SemiconductorsDeep-level DefectsEtch DamageEtch-induced DefectsEtchingGallium Nitride (Gan) MaterialsSelective Etching
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