Frequency Effect on Voltage Linearity of $ \hbox{ZrO}_{2}$-Based RF Metal–Insulator–Metal Capacitors

Abstract

This letter deals with the electrical and wideband frequency characterizations of metal-insulator-metal capacitors integrating medium-¿ material, ZrO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> . In particular, this letter focuses on the frequency effect on the voltage linearity of these capacitors and material. The dependence of the voltage-capacitance coefficient (VCC) ¿ is, for the first time, studied from 1 kHz to 1 GHz. Intrinsic or extrinsic material origin of the VCC are discussed.