IEEE/LEOS International Conference on Optical MEMS · 2003 · 13 citations · 0 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationBulk MicromachiningMems ActuatorsMicromachiningOptical MemsPiezoelectric ActuationPiezoelectric ActuatorsHinge Region StructureMems MicromirrorsMicromirrorsPiezoelectric Cantilever Actuators
In this paper, a bulk micromachined PZT micromirror with low voltage operation, large tilting angle, and two-axes degree of freedom is discussed for optical applications. The micromirror is connected to PZT cantilevers by hinge structure to minimize mechanical constraint. The maximum tilting angle of the fabricated micromirror is 3.5/spl deg/ at low voltage of 40 V.