AlN Wafers Fabricated by Hydride Vapor Phase Epitaxy - Concepedia

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AlN Wafers Fabricated by Hydride Vapor Phase Epitaxy

10

Citations

2

References

1999

Year

A. E. Nikolaev, Irina P. Nikitina, A. S. Zubrilov, M. G. Mynbaeva, Yuriy Melnik, V. Dmitriev

MRS Proceedings

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringAln Wafers FabricatedApplied PhysicsMolecular Beam EpitaxyChemical Vapor Deposition

References

	Year	Citations

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