IEEE Transactions on Semiconductor Manufacturing · 1995 · 35 citations · 18 references
EngineeringManufacturing EngineeringQuality ManagementProcess DesignProcess Systems EngineeringQuality EngineeringProcess EngineeringProcess IntegrationProcess OptimizationYield AnalysisYield ImprovementYield ManagementAxis ScalingCross-functional Design TeamsIntegrated Process DesignJoint Process DevelopmentProcess Design SpaceProcess YieldProcess Yield ControlProcess Yield Improvement
An integrated framework for yield management and defect/fault reduction is presented. A 3D space consisting of a quality axis, a process integration axis, and a scaling axis encompasses all process and manufacturing parameters. Cross-functional teams of process, equipment, operations, and materials personnel proactively explore this space, and provide process engineers with a stable and capable environment for process development and manufacturing activities.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
18