2006 · 12 citations · 2 references
EngineeringOptic DesignMechanical EngineeringFlat Mirrors 120Optical TestingActuator DesignMicroactuatorMicro-electromechanical SystemMicromachinesSoft RoboticsOptical PropertiesInstrumentationGraded-reflectivity MirrorsMechatronicsActuationFreeform OpticMum PistonMicropositioningMicroelectronicsMicrofabricationMechanical SystemsScalable Slm Arrays
We present arrays of electrostatically actuated 64times64 piston-tip-tilt micromirrors realized using a surface micromachining 3-structural-layer polysilicon process. High fill factor, flat mirrors 120 mum in size have mechanical response in the order of 10 mus, with plusmn4 mechanical tip and tilt and 5 mum piston continuous, controllable range under 110 V. The actuator design is based on four dual in-plane comb drives with 0.5 mum critical features size
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