Silane controlled three dimensional GaN growth and recovery stages on a cone-shape nanoscale patterned sapphire substrate by MOCVD

J. Z. Li, Z. Z. Chen, Qianqian Jiao, Yulong Feng, Shuang Jiang, Y.F. Chen, Tongjun Yu, S. F. Li, G. Y. Zhang

CrystEngComm · 2015 · 18 citations · 24 references

Concepts

Abstract

The silane-controlled 3D growth led to a high crystalline quality, much strain relaxation and a specular surface for the GaN epilayers on NPSS.

References

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