Publication | Closed Access
Reduction of dislocation density in heteroepitaxial GaN: role of SiH4 treatment
75
Citations
13
References
2004
Year
Materials EngineeringMaterials ScienceSemiconductor TechnologyWide-bandgap SemiconductorEngineeringApplied PhysicsHeteroepitaxial GanGan Power DeviceDislocation DensitySih4 Treatment
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