2002 · 22 citations · 8 references
EngineeringElectrical EngineeringMechanical EngineeringMicrofabricationSensorsVibrationMems CharacterizationMems DesignMems SensorsMicroelectromechanical SensorsMicromachiningSurface MicromachiningCapacitanceGyroscopesMicrofabricated SensorsMicromachined SensorsMicroscale SensingNonlinearityPolysiliconQ Factor
A dual-axis microgyroscope is fabricated by a surface micromachining process. A 7.0 /spl mu/m-thick polysilicon layer deposited by LPCVD is used for the vibrating structure. We report the closed-loop rate detection of a microgyroscope based on the rotational vibration of the four plates. In particular, the structure utilizes a simple force-balancing torsional torque which does not need another top electrode layer to reduce the intrinsic nonlinearity of a capacitance-type sensor. The gyroscope is tested in a high vacuum chamber for a high Q-factor with hybrid signal-conditioning integrated circuit. The experiment resulted in a noise equivalent signal of 0.1 deg/sec.
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A micromachined comb-drive tuning fork rate gyroscope
Jonathan Bernstein, S. Cho, A. Thomas King et al. · 2002 · 283 citations
Engineering, Electrical Engineering, Mechanical Engineering +11
Introduction to space dynamics
V. Szebehely · Journal of the Franklin Institute · 1962 · 160 citations