Concepedia

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The fabrication and use of micromachined corrugated silicon diaphragms

DOI

83

Citations

5

References

1990

Year

J.H. Jerman
Sensors and Actuators A Physical

References

YearCitations

Scaling limits in batch-fabricated silicon pressure sensors

Hin-Leung Chau, K.D. Wise

IEEE Transactions on Electron Devices

1987

161

An accurate, simplified method for analyzing thin plates undergoing large deflections

Charles W. Bert, Jeffery L. Martindale

AIAA Journal

1988

16

A miniature Fabry-Perot interferometer fabricated using silicon micromachining techniques

J.H. Jerman, Sara Mallinson

2003

13

NONLINEAR ANALYSIS OF CORRUGATED ANNULAR PLATES UNDER COMPOUND LOAD

Rong Liu

中国科学A辑(英文版)

1985

12

The rigidity of corrugated diaphragms

J. A. Haringx

Applied Scientific Research

1951

10

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