Thermal characterization of a microheater for micromachined gas sensors

Micromachined metal oxide gas sensors: opportunities to improve sensor performance

Isolde Simon, Nicolae Bârsan, Michael Bauer et al. · Sensors and Actuators B Chemical · 2001 · 643 citations

Materials Science, Chemical Engineering, Engineering +11

Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus

Samara L. Firebaugh, Klavs F. Jensen, Martin A. Schmidt · Journal of Microelectromechanical Systems · 1998 · 189 citations

Engineering, Thin Film Process Technology, Nanotribology +17

Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors

D. Briand, B. van der Schoot, Udo Weimar et al. · Sensors and Actuators B Chemical · 2000 · 187 citations · Full text

Materials Science, Engineering, Microfabrication +11

Thermal analysis of electromigration test structures

Harry A. Schafft · IEEE Transactions on Electron Devices · 1987 · 170 citations

Engineering, Mechanical Engineering, Interconnect (Integrated Circuits) +19

Fast temperature programmed sensing for micro-hotplate gas sensors

Richard E. Cavicchi, John S. Suehle, K.G. Kreider et al. · IEEE Electron Device Letters · 1995 · 117 citations

Engineering, Gas Sensor, Operating Mode +16