Publication | Closed Access
Realization and performance of thin SiO2/SiNx membrane for microheater applications
117
Citations
11
References
1998
Year
Materials ScienceCatalytic MembraneChemical EngineeringEngineeringMicrofabricationThin Sio2/sinx MembranePorous MembraneCeramic MembraneMembrane CharacterizationHeat TransferMicroelectronicsMembrane TechnologyMixed Conductors
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