Characteristics of Cerium Oxide for Metal–Insulator–Metal Capacitors

Abstract

In this article, we describe our successful fabrication of a metal–insulator–metal (MIM) capacitor with a low voltage nonlinearity. A low leakage current of at and a small were obtained at a high density for a MIM capacitor. The small for a thick dielectric was much better than the reported dielectrics of , , and at a similar κ-value (15–20). The good analog performance was due to the combined effect of the dielectric and the high work-function metals.