Journal of Research of the National Bureau of Standards · 1987 · 66 citations · 12 references
EngineeringElectrical EngineeringInstrumentationMetrologyMicrofabricationForm MetrologyIndustrial InstrumentationIndustrial MetrologyMeasurement StandardsMeasurement UncertaintyOptical MetrologyFabricationManufacturing MetrologyMicro-metrologyNanometer-scale MetrologyOptical Microscopy MetrologyPrecision MetrologyProcess Control MetrologySub-micrometer Metrology
in accuracy as well as in precision to meet the anticipated needs of the integrated circuit (IC) industry for submicrometer dimensional metrology. This paper discusses the effects of inadequate precision and accuracy on process control in Ie fabrication and suggests some ways of circumventing these limitations until better instrumentation and standards become available.
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Development of a 500 Å spatial resolution light microscope
A. Lewis, M. Isaacson, A. Harootunian et al. · Ultramicroscopy · 1984 · 740 citations