Concepedia

Sub-micrometer Metrology

Sub-Micrometer Metrology is a specialized branch of length metrology concerned with the measurement of physical dimensions and geometric features at scales smaller than one micrometer, distinguished by the application of high-precision instrumentation and methodologies to achieve nanometer-level or sub-wavelength accuracy.

144

Publications

5.4K

Citations

590

Authors

202

Institutions

Publications per year

2017–2026

26

Parents

Publications

144

A Luminescent Molecular Thermometer for Long‐Term Absolute Temperature Measurements at the Nanoscale

Carlos D. S. Brites, Patrícia P. Lima, Nuno J. O. Silva et al. · Advanced Materials · 2010 · 467 citations

, , +14

Retention of microbial cells in substratum surface features of micrometer and sub-micrometer dimensions

Kathryn A. Whitehead, John S. Colligon, Joanna Verran · Colloids and Surfaces B Biointerfaces · 2005 · 308 citations

, , +15

The High Energy Materials Science Beamline (HEMS) at PETRA III

Norbert Schell, Andrew King, Felix Beckmann et al. · Materials science forum · 2013 · 251 citations · Full text

, , +9

Comb-calibrated laser ranging for three-dimensional surface profiling with micrometer-level precision at a distance

Esther Baumann, Fabrizio R. Giorgetta, Jean-Daniel Deschênes et al. · Optics Express · 2014 · 136 citations · Full text

, , +14

Review of Polynomial Chaos-Based Methods for Uncertainty Quantification in Modern Integrated Circuits

Arun Kaintura, Tom Dhaene, Domenico Spina · Electronics · 2018 · 120 citations · Full text

, , +11

1–5 of 144

Authors

590

  1. RG
    Ronald G. Dixson

    National Institute of Standards and Technology, United States

    5 publications · 183 citations

    5

    h-index

  2. AV
    A. V. Rakov

    Prokhorov General Physics Institute, Russia

    3 publications · 62 citations

    3

    h-index

  3. JA
    John A. Kramar

    National Institute of Standards and Technology, United States

    3 publications · 164 citations

    3

    h-index

  4. YA
    Yu. A. Novikov

    Prokhorov General Physics Institute, Russia

    3 publications · 62 citations

    3

    h-index

  5. QH
    Qiangxian Huang

    Hefei University of Technology, China

    3 publications · 101 citations

    3

    h-index

1–5 of 590

Institutions

202

  1. National Institute of Standards and Technology

    Gaithersburg, United States

    11 h-index

    32 publications

    1.1K citations

  2. Physikalisch-Technische Bundesanstalt

    Braunschweig, Germany

    9 h-index

    36 publications

    1.2K citations

  3. Centre National de la Recherche Scientifique

    Paris, France

    6 h-index

    22 publications

    573 citations

  4. National Institute of Advanced Industrial Science and Technology

    Tsukuba, Japan

    4 h-index

    14 publications

    575 citations

  5. Korea Advanced Institute of Science and Technology

    Daejeon, South Korea

    3 h-index

    12 publications

    420 citations

  6. The University of Tokyo

    Tokyo, Japan

    3 h-index

    6 publications

    154 citations

  7. Technische Universität Braunschweig

    Braunschweig, Germany

    3 h-index

    5 publications

    154 citations

  8. Prokhorov General Physics Institute

    Moscow, Russia

    3 h-index

    5 publications

    110 citations

1–8 of 202

Venues

  1. 14

    h-index

  2. Measurement Science and Technology

    12 publications · 528 citations

    10

    h-index

  3. Optics Express

    8 publications · 331 citations

    8

    h-index

  4. Advanced Materials

    4 publications · 588 citations

    4

    h-index

  5. Applied Sciences

    3 publications · 72 citations

    3

    h-index

1–5