Concepedia

Diana Nyyssonen

DN

Statistics

Publications

11

Citations

445

H-Index

11

Active since

1973

Affiliations

National Institute of Standards and Technology(Current)

Diana Nyyssonen is an author at National Institute of Standards and Technology specializing in engineering, optical metrology, and optics.

Publications per year

1973–1991

11

Publications

11

Theory of optical edge detection and imaging of thick layers

Diana Nyyssonen · Journal of the Optical Society of America · 1982 · 96 citations

Engineering, Electrical Engineering, Physics +17

Linewidth measurement with an optical microscope: the effect of operating conditions on the image profile

Diana Nyyssonen · Applied Optics · 1977 · 73 citations

Medicine, Physics, Metrology +14

Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theory

Diana Nyyssonen, Chris P. Kirk · Journal of the Optical Society of America A · 1988 · 67 citations

Natural Sciences, Electrical Engineering, Manufacturing Engineering +16

Submicrometer linewidth metrology in the optical microscope

Diana Nyyssonen, Robert D. Larrabee · Journal of Research of the National Bureau of Standards · 1987 · 66 citations · Full text

Engineering, Electrical Engineering, Instrumentation +16

Two-dimensional atomic force microprobe trench metrology system

Diana Nyyssonen, L. Landstein, E. Coombs · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 39 citations

Engineering, Mechanical Engineering, Physics +17

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