Concepedia

E. Coombs

EC

Statistics

Publications

1

Citations

39

H-Index

1

Active since

1991

Affiliations

IBM (United States)(Current)

E. Coombs is an author at IBM (United States) specializing in heterodyne interferometry, heterodyne detection, and nanometer-scale displacement measurement.

Publications per year

1991–1991

1

Publications

1

Two-dimensional atomic force microprobe trench metrology system

Diana Nyyssonen, L. Landstein, E. Coombs · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 39 citations

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