The role of implantation temperature and dose in the control of the microstructure of SIMOX structures - Concepedia

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The role of implantation temperature and dose in the control of the microstructure of SIMOX structures

60

Citations

17

References

1988

Year

K.J. Reeson, A.K. Robinson, P.L.F. Hemment, Christopher Marsh, K. N. Christensen, G. R. Booker, Richard J. Chater, John A. Kilner, G. Harbeke, E.F. Steigmeir,

Microelectronic Engineering

Materials ScienceTissue EngineeringMaterials EngineeringImplantable DeviceEngineeringMicrofabricationBiomedical EngineeringPlasticityImplantation TemperatureMicrostructureSimox Structures

References

	Year	Citations

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