Concepedia
Sensors and Actuators A Physical · 1995 · 212 citations · 6 references
EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationMems CharacterizationMicrofabrication ProcessesFabricationHigh-frequency PerformanceMicropumpsPump DesignPumpsSizeStatic ModelsValves
6
A valveless diffuser/nozzle-based fluid pump
E. Stemme, Göran Stemme · Sensors and Actuators A Physical · 1993 · 663 citations
Engineering, Chemical Engineering, Fluid Dynamics +9
A piezoelectric micropump based on micromachining of silicon
H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra · Sensors and Actuators · 1988 · 617 citations · Full text
Engineering, Materials Engineering, Mechanical Engineering +12
A thermopneumatic micropump based on micro-engineering techniques
F.C.M. van de Pol, H.T.G. van Lintel, J.H.J. Fluitman · Sensors and Actuators A Physical · 1990 · 280 citations · Full text
Engineering, Bioengineering, Mechanical Engineering +13
Micropump and sample-injector for integrated chemical analyzing systems
Shuichi Shoji, Shigeru Nakagawa, Masayoshi Esashi · Sensors and Actuators A Physical · 1990 · 145 citations
Engineering, Chemical Engineering, Chemistry +10
A silicon integrated miniature chemical analysis system
Bart H. van der Schoot, S. Jeanneret, Albert van den Berg et al. · Sensors and Actuators B Chemical · 1992 · 72 citations