Thin Solid Films · 2005 · 58 citations · 2 references
EngineeringComputer EngineeringSystems EngineeringComputer ArchitectureSystem-on-chip DesignSystems ArchitectureChip PackagingIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationIntegration ArchitectureSystems IntegrationHeterogeneous IntegrationIntegrated Passive ComponentsSystem-in-packageSystem-in-package IntegrationThrough-silicon Via Packaging
2
High-Q integrated RF passives and RF-MEMS on silicon
Joost T.M. van Beek, M. H. W. M. van Delden, A. van Dijken et al. · MRS Proceedings · 2003 · 21 citations