Concepedia

High-Q integrated RF passives and RF-MEMS on silicon

Joost T.M. van Beek, M. H. W. M. van Delden, A. van Dijken, Patrick van Eerd, A.B.M. Jansman, A.L.A.M. Kemmeren, Theo G. S. M. Rijks, Peter G. Steeneken, Jaap M. J. den Toonder, M.J.E. Ulenaers,

MRS Proceedings · 2003 · 21 citations · 1 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceMicroelectromechanical SystemsMicroelectronicsSemiconductor DevicesHigh-frequency Semiconductor DevicesIntegrated Circuit DesignIntegrated Circuit DevicesMicrowave Passive ComponentsRadio-frequency Integrated CircuitsRf MemsIntegrated Passive ComponentsIntegrated Passive DevicesSilicon

References

1

Metallurgical Transactions A

JOM · 1985 · 217 citations