J. F. C. M. Verhoeven

Etching of Deep Macropores in 6 in. Si Wafers

J. E. A. M. van den Meerakker, R. Elfrink, F. Roozeboom et al. · Journal of The Electrochemical Society · 2000 · 48 citations

Engineering, Materials Engineering, Materials Science +16

High-value MOS capacitor arrays in ultradeep trenches in silicon

F. Roozeboom, R. Elfrink, J. F. C. M. Verhoeven et al. · Microelectronic Engineering · 2000 · 40 citations

Engineering, Electrical Engineering, Materials Science +10

Specimen preparation technique for high resolution transmission electron microscopy studies on model supported metal catalysts

Jan W. M. Jacobs, J. F. C. M. Verhoeven · Journal of Microscopy · 1986 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +17

High-density, low-loss MOS capacitors for integrated RF decoupling

F. Roozeboom, R. Elfrink, T.G.S.M. Rijks et al. · ˜The œInternational journal of microcircuits and electronic packaging · 2001 · 31 citations

Engineering, Electrical Engineering, Microelectronics +16

ALD Options for Si-integrated Ultrahigh-density Decoupling Capacitors in Pore and Trench Designs

F. Roozeboom, J.H. Klootwijk, J. F. C. M. Verhoeven et al. · ECS Transactions · 2007 · 26 citations · Full text

Engineering, Electrical Engineering, Materials Engineering +17