Publication | Closed Access
Atomic layer deposition of highly conductive indium oxide using a liquid precursor and water oxidant
52
Citations
32
References
2015
Year
Materials ScienceChemical EngineeringEngineeringOxide ElectronicsSurface ScienceChemistryChemical DepositionConductive IndiumChemical Vapor DepositionAtomic Layer DepositionLiquid Precursor
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