Publication | Closed Access
Applications of atomic layer deposition to nanofabrication and emerging nanodevices
584
Citations
213
References
2008
Year
Materials ScienceEngineeringNanomaterialsNanotechnologyNanodevicesNanomanufacturingApplied PhysicsNanostructured SurfaceNanofabricationChemical DepositionChemical Vapor DepositionAtomic Layer Deposition
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