Mechanical and Dielectric Properties of Pure‐Silica‐Zeolite Low‐<i>k</i> Materials

Abstract

Special k: Pure silica zeolites (PSZs) have been shown experimentally to display a remarkably higher elastic modulus than amorphous porous silicas at any given porosity or dielectric constant (k) value as a result of their crystalline structure. The combined experimental and theoretical findings suggest that PSZs have the necessary properties for use as the next generation of low-k insulators. Supporting information for this article is available on the WWW under http://www.wiley-vch.de/contents/jc_2002/2006/z602036_s.pdf or from the author. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.