Relationship Among Input-Force, Payload, Stiffness, and Displacement of a 6-DOF Perpendicular Parallel Micromanipulator

Abstract

Micromanipulators play an important role in the precision engineering field from optical stages to micro-electromechanical systems for their excellent performances. In this paper, a 6-DOF perpendicular parallel micromanipulator (PPMM) is proposed and its prototype is developed. The isotropy and decoupled characteristics of the 6-DOF PPMM are discussed. The relationship among input-force, payload, stiffness, and displacement (IPSD) of the 6-DOF PPMM is studied and the model of the relationship among the IPSD is derived in an analytical style. The relation between voltage value of piezoelectric actuator and output displacement is obtained base on an IPSD model. Finally, the simulations by finite element method and the test of the prototype of the 6-DOF PPMM are performed. Compared with the results of simulations and the test, the feasibility of IPSD model is verified. The proposed model is useful for both digital control of the 6-DOF PPMMs and design of the micromanipulators.