One-kilobit cross-bar molecular memory circuits at 30-nm half-pitch fabricated by nanoimprint lithography

Imprint Lithography with 25-Nanometer Resolution

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Science · 1996 · 2.3K citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

Nanoimprint lithography

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

A Defect-Tolerant Computer Architecture: Opportunities for Nanotechnology

James R. Heath, Philip J. Kuekes, Gregory S. Snider et al. · Science · 1998 · 894 citations

Engineering, Computer Engineering, Computer Science +15

Nanoscale molecular-switch crossbar circuits

Yong Chen, Gun Young Jung, Douglas A. A. Ohlberg et al. · Nanotechnology · 2003 · 632 citations

Natural Sciences, Materials Engineering, Materials Science +12

Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography

Michael D. Austin, Haixiong Ge, Wei Wu et al. · Applied Physics Letters · 2004 · 608 citations

Engineering, Materials Engineering, Materials Science +12