One-kilobit cross-bar molecular memory circuits at 30-nm half-pitch fabricated by nanoimprint lithography

Imprint Lithography with 25-Nanometer Resolution

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Science · 1996 · 2.2K citations

Engineering, Electron-beam Lithography, Microscopy +18

Nanoimprint lithography

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations

Uniformity Area, Engineering, Electron-beam Lithography +19

A Defect-Tolerant Computer Architecture: Opportunities for Nanotechnology

James R. Heath, Philip J. Kuekes, Gregory S. Snider et al. · Science · 1998 · 889 citations

Hardware Security, Parallel Experimental Computer, Engineering +15

Nanoscale molecular-switch crossbar circuits

Yong Chen, Gun Young Jung, Douglas A. A. Ohlberg et al. · Nanotechnology · 2003 · 631 citations

Engineering, Nanodevices, Emerging Memory Technology +23

Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography

Michael D. Austin, Haixiong Ge, Wei Wu et al. · Applied Physics Letters · 2004 · 603 citations

Gold Contacts, Engineering, Pattern Transfer +17