Publication | Closed Access
Micropipes: Hollow Tubes in Silicon Carbide
87
Citations
21
References
1997
Year
Materials ScienceEngineeringMicrofabricationMechanical EngineeringApplied PhysicsHollow TubesCarbideEnergetic AspectsStructural CeramicSic Single CrystalsMicroelectronicsHollow Tubular DefectsMechanics Of MaterialsMicrostructure
Micropipes are hollow tubular defects penetrating SiC single crystals. Different mechanisms of formation and stabilization as well as energetic aspects are discussed.
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