V.D. Heydemann

Micropipes: Hollow Tubes in Silicon Carbide

J. Heindl, H. P. Strunk, V.D. Heydemann et al. · physica status solidi (a) · 1997 · 87 citations

Materials Science, Engineering, Microfabrication +11

Chemi-Mechanical Polishing of On-Axis Semi-Insulating SiC Substrates

V.D. Heydemann, W.J. Everson, Rick D. Gamble et al. · Materials science forum · 2004 · 48 citations

Materials Science, Engineering, Surface Science +5

Transmission electron microscopy analysis of mechanical polishing-related damage in silicon carbide wafers

J.R. Grim, Mourad Benamara, Marek Skowroński et al. · Semiconductor Science and Technology · 2006 · 42 citations

Engineering, Severe Plastic Deformation, Mechanical Engineering +21

Growth of 6H and 4H silicon carbide single crystals by the modified Lely process utilizing a dual-seed crystal method

V.D. Heydemann, Norbert Schulze, D.L. Barrett et al. · Applied Physics Letters · 1996 · 40 citations

Materials Science, Materials Engineering, Engineering +12

Polishing and Surface Characterization of SiC Substrates

W.J. Everson, David W. Snyder, V.D. Heydemann · Materials science forum · 2000 · 30 citations

Materials Science, Engineering, Surface Science +5