Concepedia

Publication | Closed Access

Chemi-Mechanical Polishing of On-Axis Semi-Insulating SiC Substrates

DOI

48

Citations

2

References

2004

Year

V.D. Heydemann, W.J. Everson, Rick D. Gamble, David Snyder, Marek Skowroński
Materials science forum

References

YearCitations

Page 1