Analysis of thin film piezoelectric microaccelerometer using analytical and finite element modeling

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Sensors and Actuators A Physical · 2003 · 394 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Piezoelectric sensorics: force, strain, pressure, acceleration and acoustic emission sensors, materials and amplifiers

Choice Reviews Online · 2002 · 155 citations

Engineering, Electrical Engineering, Materials Science +17

Fabrication and Electrical Properties of Lead Zirconate Titanate Thick Films

H. Daniel Chen, Krishna Udayakumar, C.J. Gaskey et al. · Journal of the American Ceramic Society · 1996 · 143 citations

Natural Sciences, Materials Engineering, Materials Science +17

Design of novel thin-film piezoelectric accelerometer

Y. Nemirovsky, Amikam Nemirovsky, Paul Muralt et al. · Sensors and Actuators A Physical · 1996 · 133 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Ferroelectric and antiferroelectric films for microelectromechanical systems applications

Baomin Xu, L. E. Cross, Jonathan Bernstein · Thin Solid Films · 2000 · 113 citations

Natural Sciences, Materials Engineering, Materials Science +14