Design of novel thin-film piezoelectric accelerometer

Semiconductor sensors

Choice Reviews Online · 1995 · 574 citations

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry

F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 445 citations · Full text

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substrates

Keith G. Brooks, Ian M. Reaney, Radosveta D. Klissurska et al. · Journal of materials research/Pratt's guide to venture capital sources · 1994 · 309 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

A comparison of squeeze-film theory with measurements on a microstructure

M.K. Andrews, I.M. Harris, G.C. Turner · Sensors and Actuators A Physical · 1993 · 214 citations

Natural Sciences, Materials Science, Physics +10

Fabrication and characterization of PZT thin-film vibrators for micromotors

Paul Muralt, Markus Köhli, Thomas Maeder et al. · Sensors and Actuators A Physical · 1995 · 185 citations · Full text

Engineering, Materials Science, Mechatronics Engineering +12