Journal of Micromechanics and Microengineering · 1996 · 30 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSemiconductor DevicesMicrofabrication MaterialsMicrofabrication ProcessesMicrofluidic SystemsMicrofluidicsMicromachiningDevice FabricationGas FlowGas Transfer RateGlass StructureMicrovalve DesignMicrovalvesSilicon Micromachining
A new bakable pneumatic silicon microvalve has been developed by micromachining for advanced semiconductor device fabrication. This microvalve is composed of an anodically bonded glass - silicon - glass structure and it is further bonded to a Kovar alloy block which has stainless steel tubes. The gas flow rate could be controlled from 0.5 sccm to 50 sccm at an inlet pressure of . This microvalve can be used in the temperature range from 25 to .
8
Field Assisted Glass-Metal Sealing
George Wallis, D. Pomerantz · Journal of Applied Physics · 1969 · 730 citations
Natural Sciences, Materials Engineering, Materials Science +7
Micromachined silicon microvalve
T.R. Ohnstein, Takeshi Fukiura, Jeff A. Ridley et al. · 2002 · 110 citations
Engineering, Biomedical Engineering, Mechanical Engineering +17