Concepedia

Publication | Closed Access

A silicon microvalve with combined electromagnetic/electrostatic actuation

DOI

88

Citations

9

References

1993

Year

D. Bosch, B.B. Heimhofer, G. Mück, H. Seidel, U. Thumser, W. Welser
Sensors and Actuators A Physical

References

YearCitations

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