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Realisation and metrological characterisation of thickness standards below 100�nm

DOI

16

Citations

3

References

2004

Year

Peter Thomsen-Schmidt, G. Ulm, Konrad Herrmann, Michael Krumrey, George Ade, J. St�mpel, I. Busch, S. Sch�dlich, A. Schindler, W. Frank,
Applied Physics A

References

YearCitations

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