W. Frank

Ion beam assisted smoothing of optical surfaces

Renate Fechner, D. Flamm, W. Frank et al. · Applied Physics A · 2004 · 63 citations

Photonics, Optical Materials, Engineering +8

Particle energy and angle distributions in ion beam sputtering

E. Franke, H. Neumann, Michael Zeuner et al. · Surface and Coatings Technology · 1997 · 30 citations

Physics, Applied Physics, Ion Beam Sputtering +2

Mo/Si multilayers for EUV lithography by ion beam sputter deposition

Thomas Chassé, H. Neumann, B. Ocker et al. · Vacuum · 2003 · 22 citations

Materials Science, Materials Engineering, Engineering +10

Electron probe microanalysis (EPMA) measurement of thin-film thickness in the nanometre range

M. Procop, Martin Radtke, Michael Krumrey et al. · Analytical and Bioanalytical Chemistry · 2002 · 19 citations

Materials Science, Engineering, Electron Microscopy +13

Realisation and metrological characterisation of thickness standards below 100�nm

Peter Thomsen-Schmidt, G. Ulm, Konrad Herrmann et al. · Applied Physics A · 2004 · 16 citations

Precision Measurement, Engineering, Nondestructive Testing +4